29/05/2023
Peraturan sebelum masuk cleanroom.
Makmal Fabrikasi MEMS, IMEN
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Makmal Fabrikasi MEMS, Institut Kejuruteraan Mikro & Nanoelektronik (IMEN)
29/05/2023
26/03/2023
Fabrication and meteorology tools in our mems fab.
20/02/2023
Spin coater
02/02/2023
Mask aligner
02/02/2023
Sputtering ZnO target on ITO sample.
01/02/2023
NTI Nanofilm DC/RF Magnetron sputter.
Available targets - Al, Cu, Ti, Ni, Co, Mo, Cr, Ta, AlN, SiO2, ZnO2.
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IMEN, UKM
Kajang
43600